Off-axis low-coherence interferometry for surface topology measurement.

Details

Serval ID
serval:BIB_EB5840C5167A
Type
Inproceedings: an article in a conference proceedings.
Collection
Publications
Institution
Title
Off-axis low-coherence interferometry for surface topology measurement.
Title of the conference
Speckle 2010: Optical Metrology
Author(s)
Delacrétaz Y., Boss D., Lang F., Depeursinge C.
Address
Florianopolis, Brazil, September, 13-15, 2010
ISBN
0277-786X
ISSN-L
978-0-8194-7670-8
Publication state
Published
Issued date
2010
Volume
7387
Series
SPIE Proceedings
Pages
738715
Language
english
Abstract
In this communication we introduce a low or reduced coherence interferometry technique that can be used to retrieve surface topology on samples with high roughness. Moreover, we will show that the approach enables surface topology measurement also at the interface of so-called turbid media, where multiple scattering inside tissues can be a major issue, preventing accurate measurements.
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Create date
01/05/2013 17:32
Last modification date
20/08/2019 17:13
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