Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor.

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Version: author
Serval ID
serval:BIB_A7ED28D9C197
Type
Article: article from journal or magazin.
Collection
Publications
Institution
Title
Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor.
Journal
Biomedical Microdevices
Author(s)
Hasenkamp W., Forchelet D., Pataky K., Villard J., Lintel H.V., Bertsch A., Wang Q., Renaud P.
ISSN
1572-8781 (Electronic)
ISSN-L
1387-2176
Publication state
Published
Issued date
2012
Peer-reviewed
Oui
Volume
14
Number
5
Pages
819-828
Language
english
Notes
Publication types: Journal Article
Abstract
This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive elements. A chamber containing this flexible membrane was sealed using an adapted SU-8 bonding technique. The device was evaluated experimentally and its overall performance compared with a commercial silicon-based pressure sensor. Furthermore, the device use was demonstrated by measuring blood pressure and heart rate in vivo.
Pubmed
Web of science
Open Access
Yes
Create date
18/10/2012 18:06
Last modification date
20/08/2019 16:12
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