Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor.

Détails

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Etat: Public
Version: de l'auteur⸱e
ID Serval
serval:BIB_A7ED28D9C197
Type
Article: article d'un périodique ou d'un magazine.
Collection
Publications
Institution
Titre
Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor.
Périodique
Biomedical Microdevices
Auteur⸱e⸱s
Hasenkamp W., Forchelet D., Pataky K., Villard J., Lintel H.V., Bertsch A., Wang Q., Renaud P.
ISSN
1572-8781 (Electronic)
ISSN-L
1387-2176
Statut éditorial
Publié
Date de publication
2012
Peer-reviewed
Oui
Volume
14
Numéro
5
Pages
819-828
Langue
anglais
Notes
Publication types: Journal Article
Résumé
This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive elements. A chamber containing this flexible membrane was sealed using an adapted SU-8 bonding technique. The device was evaluated experimentally and its overall performance compared with a commercial silicon-based pressure sensor. Furthermore, the device use was demonstrated by measuring blood pressure and heart rate in vivo.
Pubmed
Web of science
Open Access
Oui
Création de la notice
18/10/2012 18:06
Dernière modification de la notice
20/08/2019 16:12
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