Surface reconstruction from microscopic images in optical lithography.

Details

Serval ID
serval:BIB_D0A434386C5C
Type
Article: article from journal or magazin.
Collection
Publications
Institution
Title
Surface reconstruction from microscopic images in optical lithography.
Journal
Ieee Transactions On Image Processing
Author(s)
Estellers V., Thiran J.P., Gabrani M.
ISSN
1941-0042 (Electronic)
ISSN-L
1057-7149
Publication state
Published
Issued date
08/2014
Peer-reviewed
Oui
Volume
23
Number
8
Pages
3560-3573
Language
english
Abstract
This paper presents a method to reconstruct 3D surfaces of silicon wafers from 2D images of printed circuits taken with a scanning electron microscope. Our reconstruction method combines the physical model of the optical acquisition system with prior knowledge about the shapes of the patterns in the circuit; the result is a shape-from-shading technique with a shape prior. The reconstruction of the surface is formulated as an optimization problem with an objective functional that combines a data-fidelity term on the microscopic image with two prior terms on the surface. The data term models the acquisition system through the irradiance equation characteristic of the microscope; the first prior is a smoothness penalty on the reconstructed surface, and the second prior constrains the shape of the surface to agree with the expected shape of the pattern in the circuit. In order to account for the variability of the manufacturing process, this second prior includes a deformation field that allows a nonlinear elastic deformation between the expected pattern and the reconstructed surface. As a result, the minimization problem has two unknowns, and the reconstruction method provides two outputs: 1) a reconstructed surface and 2) a deformation field. The reconstructed surface is derived from the shading observed in the image and the prior knowledge about the pattern in the circuit, while the deformation field produces a mapping between the expected shape and the reconstructed surface that provides a measure of deviation between the circuit design models and the real manufacturing process.
Pubmed
Web of science
Create date
15/12/2014 14:54
Last modification date
20/08/2019 15:50
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