Axial sub-nanometer accuracy in digital holographic microscopy
Details
Serval ID
serval:BIB_B7E84A2FF674
Type
Article: article from journal or magazin.
Collection
Publications
Institution
Title
Axial sub-nanometer accuracy in digital holographic microscopy
Journal
Measurement Science and Technology
ISSN
0957-0233
Publication state
Published
Issued date
2008
Peer-reviewed
Oui
Volume
19
Number
7
Pages
074007
Language
english
Notes
SAPHIRID:78000
Abstract
We present state-of-the-art dual-wavelength digital holographic microscopy (DHM) measurement on a calibrated 8.9 nm high chromium thin step sample and demonstrate sub-nanometer axial accuracy. By using a modified DHM reference calibrated hologram (RCH) reconstruction method, a temporal averaging procedure and a specific dual-wavelength DHM arrangement, it is shown that specimen topography can be measured with an accuracy, defined as the axial standard deviation, reduced to at least 0.9 nm. Indeed for the first time to the best of our knowledge, it is reported that averaging each of the two wavefronts recorded with real-time dual-wavelength DHM can provide up to 30% spatial noise reduction for the given configuration. Moreover, the presented experimental configuration achieves a temporal stability below 0.8 nm, thus paving the way to Angström range for dual-wavelength DHM.
Web of science
Create date
13/02/2009 14:35
Last modification date
20/08/2019 15:26