Axial sub-nanometer accuracy in digital holographic microscopy

Détails

ID Serval
serval:BIB_B7E84A2FF674
Type
Article: article d'un périodique ou d'un magazine.
Collection
Publications
Titre
Axial sub-nanometer accuracy in digital holographic microscopy
Périodique
Measurement Science and Technology
Auteur(s)
Kühn Jonas, Charrière Florian, Colomb Tristan, Cuche Etienne, Montfort Frédéric, Emery Yves, Marquet Pierre, Depeursinge Christian
ISSN
0957-0233
Statut éditorial
Publié
Date de publication
2008
Peer-reviewed
Oui
Volume
19
Numéro
7
Pages
074007
Langue
anglais
Notes
SAPHIRID:78000
Résumé
We present state-of-the-art dual-wavelength digital holographic microscopy (DHM) measurement on a calibrated 8.9 nm high chromium thin step sample and demonstrate sub-nanometer axial accuracy. By using a modified DHM reference calibrated hologram (RCH) reconstruction method, a temporal averaging procedure and a specific dual-wavelength DHM arrangement, it is shown that specimen topography can be measured with an accuracy, defined as the axial standard deviation, reduced to at least 0.9 nm. Indeed for the first time to the best of our knowledge, it is reported that averaging each of the two wavefronts recorded with real-time dual-wavelength DHM can provide up to 30% spatial noise reduction for the given configuration. Moreover, the presented experimental configuration achieves a temporal stability below 0.8 nm, thus paving the way to Angström range for dual-wavelength DHM.
Web of science
Création de la notice
13/02/2009 14:35
Dernière modification de la notice
20/08/2019 15:26
Données d'usage