Dual-wavelength digital holographic microscopy with sub-nanometer axial accuracy

Détails

ID Serval
serval:BIB_68CB6ACCD1B4
Type
Article: article d'un périodique ou d'un magazine.
Collection
Publications
Titre
Dual-wavelength digital holographic microscopy with sub-nanometer axial accuracy
Périodique
Progress in Biomedical Optics and Imaging
Auteur(s)
Kühn Jonas, Charrière Florian, Colomb Tristan, Montfort Frédéric, Emery Yves, Marquet Pierre, Depeursinge Christian
ISSN
1605-7422
Statut éditorial
Publié
Date de publication
2008
Peer-reviewed
Oui
Volume
6995
Numéro
699503
Langue
anglais
Notes
SAPHIRID:78029
Résumé
We present dual-wavelength Digital Holographic Microscopy (DHM) measurements on a certified 8.9 nm high Chromium thin step sample and demonstrate sub-nanometer axial accuracy. We introduce a modified DHM Reference Calibrated Hologram (RCH) reconstruction algorithm taking into account amplitude contributions. By combining this with a temporal averaging procedure and a specific dual-wavelength DHM arrangement, it is shown that specimen topography can be measured with an accuracy, defined as the axial standard deviation, reduced to at least 0.9 nm. Indeed, it is reported that averaging each of the two wavefronts recorded with real-time dual-wavelength DHM can provide up to 30% spatial noise reduction for the given configuration, thanks to their non-correlated nature. ©2008 COPYRIGHT SPIE
Web of science
Création de la notice
17/02/2009 10:11
Dernière modification de la notice
20/08/2019 14:23
Données d'usage