Characterization of microlenses by digital holographic microscopy

Détails

ID Serval
serval:BIB_5CD5A3FE5C6A
Type
Article: article d'un périodique ou d'un magazine.
Collection
Publications
Titre
Characterization of microlenses by digital holographic microscopy
Périodique
Applied Optics
Auteur(s)
Charrière Florian, Kühn Jonas, Colomb Tristan, Montfort Frédéric, Cuche Etienne, Emery Yves, Weible Kenneth, Marquet Pierre, Depeursinge Christian
ISSN
0003-6935
Statut éditorial
Publié
Date de publication
2006
Peer-reviewed
Oui
Volume
45
Numéro
5
Pages
829-835
Langue
anglais
Notes
SAPHIRID:67349
Résumé
We demonstrate the use of digital holographic microscopy (DHM) as a metrological tool in micro-optics testing. Measurement principles are compared with those performed with Twyman-Green, Mach-Zehnder, and white-light interferometers. Measurements performed on refractive microlenses with reflection DHM are compared with measurements performed with standard interferometers. Key features of DHM such as digital focusing, measurement of shape differences with respect to a perfect model, surface roughness measurements, and optical performance evaluation are discussed. The capability of imaging nonspherical lenses without any modification of the optomechanical setup is a key advantage of DHM compared with conventional measurement tools and is demonstrated on a cylindrical microlens and a square lens array. © 2006 Optical Society of America
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Création de la notice
10/03/2008 16:40
Dernière modification de la notice
20/08/2019 14:15
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