Empirical Evaluation of a Queueing Network Model for Semi Conductor Wafer Fabrication

Details

Serval ID
serval:BIB_237D15C08D57
Type
Article: article from journal or magazin.
Collection
Publications
Title
Empirical Evaluation of a Queueing Network Model for Semi Conductor Wafer Fabrication
Journal
Operations Research
Author(s)
van Ackere A., Chen H., Harrison J.M., Mandelbaum A., Wein L.M.
Publication state
Published
Issued date
1988
Peer-reviewed
Oui
Volume
36
Number
2
Pages
202-215
Language
english
Abstract
The congestion problems that plague wafer fabrication facilities are described in general terms, and several years' operating data from one particular facility are summarized. A simple queueing network model of that facility is constructed, and the model is used to predict certain key system performance measures. The values predicted by the model are found to be within about 10% of those actually observed. These results suggest that queueing network models can provide useful quantitative guidance to designers of wafer fabrication facilities, and we discuss refinements and extensions of our elementary model that are likely to be important in other settings. An important benefit gained from queueing theory is that congestion and delay in wafer fabrication are caused by variability in the operating environment.
Keywords
683 queueing applications, 697 queueing networks
Create date
02/06/2009 15:48
Last modification date
20/08/2019 14:01
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